OEM 3D Optical Profiler Systems

Leverage and integrate our industry-leading technology

OEM 3D Optical Profiler SensorDo you have a need for precise, high-speed, non-contact surface metrology and inspection? Are you an OEM manufacturer or system integrator looking to partner with a leading company with the experience to ensure your success? ZYGO's 3D Optical profilers are now available as a fully integrable solution with a long history of successful production integrations.

Why partner with ZYGO?

We bring decades of experience working with OEM manufacturers serving critical in-line metrology, inspection and process control for advanced manufacturing applications. Key industries served include:

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    SPEC SHEETS
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    NOTES
  • MANUALS
  • TECH PAPERS
  • VIDEOS

Why ZYGO technology?

We are experts in Coherence Scanning Interferometry (CSI). Our innovative and differentiated enables the most precise and fastest measurement of surface topography. 3D areal surface roughness, step heights, flatness, film thickness, micro-geometry and more are quantified down to sub-nanometer levels – with a single sensor solution.

  • High-speed scanning and data processing for optimal throughput.
  • Fully automated functionality and control of all hardware systems.
  • Remote access API enables simple and complete control of the Mx™ software.
  • Built in python scripting for creating custom functions and analyses.

Our experienced team of engineers and scientists are available to discuss your requirements and metrology needs and can recommend optimal configurations to address your specific requirements for speed, field-of-view, and part geometries. We look forward to partnering with you on your next successful program.

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3D Optical Profiler Accessory Guide
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3D Optical Profilers
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Nexview™ NX2, NewView™ 9000, ZeGage™ Pro Objectives
Title
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3D Optical Profiler Accessory Guide
DocumentBrochure
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3D Optical Profilers
DocumentBrochure
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Nexview™ NX2, NewView™ 9000, ZeGage™ Pro Objectives
DocumentBrochure
Download Link Download
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Form and Roughness
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Mx™ Software Films Analysis
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Measuring Sub-Angstrom Surface Texture
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Measuring Dynamic MEMS Devices
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Identifying and Controlling Vibration
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PSD Analysis
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Vision Software Suite
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ABS Geometry and MetroPro® Calculations
Title
Document
Download
Form and Roughness
DocumentAB-0100
Download Link Download
Mx™ Software Films Analysis
DocumentAN-0001
Download Link Download
Measuring Sub-Angstrom Surface Texture
DocumentAN-0002
Download Link Download
Measuring Dynamic MEMS Devices
DocumentAN-0003
Download Link Download
Identifying and Controlling Vibration
DocumentAN-0006
Download Link Download
PSD Analysis
DocumentAN-0009
Download Link Download
Vision Software Suite
DocumentAN-0011
Download Link Download
ABS Geometry and MetroPro® Calculations
DocumentAN-0012
Download Link Download
Getting the Most from the Advanced Texture Application
DocumentAN-0013
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Filtering on the NewView™
DocumentAN-0014
Download Link Download
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Optical Profiler Accessory Guide (for NewView 8/9000, & Nexview/NX2)
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Mx™ Quick-Start Guide
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Mx™ Reference Guide
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Mx™ Remote Access Guide
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Mx™ Surface Texture Parameters
Title
Document
Download
Optical Profiler Accessory Guide (for NewView 8/9000, & Nexview/NX2)
DocumentOMP-0594M
Download Link Download
Mx™ Quick-Start Guide
DocumentOMP-0570D
Download Link Download
Mx™ Reference Guide
DocumentOMP-0550D
Download Link Download
Mx™ Remote Access Guide
DocumentOMP-0600A
Download Link Download
Mx™ Surface Texture Parameters
DocumentOMP-0608C
Download Link Download
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3D Optical Profilers Are Enabling Reliable Engine Lightweighting
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A new class of wide-field objectives for 3D interference microscopy
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Accurate, repetitive, linear motion from biased piezoelectric actuators
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Advanced Metrology for Energy Efficiency
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Advances in optical metrology
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Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry
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Applications of model-based transparent surface films analysis using coherence scanning interferometry
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Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard
Title
Document
Download
3D Optical Profilers Are Enabling Reliable Engine Lightweighting
DocumentArticle
Download Link Download
A new class of wide-field objectives for 3D interference microscopy
DocumentTechnical Paper
Download Link Download
Accurate, repetitive, linear motion from biased piezoelectric actuators
DocumentTechnical Paper
Download Link Download
Advanced Metrology for Energy Efficiency
DocumentTechnical Paper
Download Link Download
Advances in optical metrology
DocumentTechnical Paper
Download Link Download
Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry
DocumentTechnical Paper
Download Link Download
Applications of model-based transparent surface films analysis using coherence scanning interferometry
DocumentTechnical Paper
Download Link Download
Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard
DocumentTechnical Paper
Download Link Download
Challenges and solutions in the optical measurement of aspheres
DocumentTechnical Paper
Download Link Download
Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler
DocumentTechnical Paper
Download Link Download

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