ZeGage™ Pro

Production Ready 3D Optical Profiler System

ZeGage Pro HR 3D Optical Profiler

The ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers provide non-contact measurement and characterization of micro- and nano-scale features of many types of surfaces, ensuring quality control and process monitoring in your manufacturing environment.

Our industry-leading ZeGage Pro-series sets the standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers. Built on ZYGO’s proprietary CSI technology, the ZeGage Pro delivers innovative technologies to enable precise, reliable, simple, and confident surface metrology.

Exclusive capabilities include SureScan™ technology for vibration robust metrology,  Part Finder, and Smart Setup for simplified part setup and optimized measurements.  It’s never been simpler to measure a wide variety of surfaces and parts, quickly and easily.

Read more to see how the ZeGage™ Pro systems' power, versatility, and value can benefit you.

  • MORE INFO
  • BROCHURES &
    SPEC SHEETS
  • APPLICATION
    NOTES
  • MANUALS
  • TECH PAPERS
  • VIDEOS

 Powerful Performance

  • Proprietary non-contact measurement technology is enhanced with SureScan™ technology for low sensitivity to vibration and easy placement anywhere within your facility.
  • Quantitative surface metrology with nanometer-level precision provides superior gage capability.
  • High resolution 1.9 million pixel image sensor provides fast areal measurements in seconds, for excellent surface detail and visualization.
  • Fully-automated measurement sequences and field stitching enable high resolution inspection of large areas. (Requires optional motorized part stage.)

Versatility

  • Measures a wide variety of surface materials and parameters, including 2D and 3D profiling of surface texture, form, step-height and more.
  • Included Mx software provides comprehensive tools for surface data visualization, analysis and reporting.
  • Expand the measurement range of your investment with accessories that include objective turrets, manual and motorized sample stages, and optional software modules for film topography profiling and 2D analysis using Cognex VisionPro®.

Productivity and Value

  • Smart Setup technology reduces training time, and shortens part changeover by automating part finding, light setting, and scan configuration. Smart Setup usually results in a first data map within 1 minute of placing the sample under the objective.
  • Cost-effective price-to-performance ratio compares favorably to alternative systems, including mechanical contact stylus profilers.
  • Non-contact method means no consumable replacement costs to worry about.
  • Compact, vibration-tolerant SureScan™ technology for easy integration anywhere in your facility.
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Service Brochure
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ZeGage™ Pro
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3D Optical Profiler Accessory Guide
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3D Optical Profilers
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Nexview™ NX2, NewView™ 9000, ZeGage™ Pro Objectives
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ZeGage™ Pro
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ZeGage™ Pro HR
Title
Document
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Service Brochure
DocumentBrochure
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ZeGage™ Pro
DocumentBrochure
Download Download
3D Optical Profiler Accessory Guide
DocumentBrochure
Download Download
3D Optical Profilers
DocumentBrochure
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Nexview™ NX2, NewView™ 9000, ZeGage™ Pro Objectives
DocumentBrochure
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ZeGage™ Pro
DocumentSpecifications
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ZeGage™ Pro HR
DocumentSpecifications
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Mx™ Software Films Analysis
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Measuring Sub-Angstrom Surface Texture
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Measuring Dynamic MEMS Devices
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Identifying and Controlling Vibration
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PSD Analysis
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Vision Software Suite
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ABS Geometry and MetroPro® Calculations
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Getting the Most from the Advanced Texture Application
Title
Document
Download
Mx™ Software Films Analysis
DocumentAN-0001
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Measuring Sub-Angstrom Surface Texture
DocumentAN-0002
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Measuring Dynamic MEMS Devices
DocumentAN-0003
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Identifying and Controlling Vibration
DocumentAN-0006
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PSD Analysis
DocumentAN-0009
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Vision Software Suite
DocumentAN-0011
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ABS Geometry and MetroPro® Calculations
DocumentAN-0012
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Getting the Most from the Advanced Texture Application
DocumentAN-0013
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Filtering on the NewView™
DocumentAN-0014
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Haze Controls Thin Film PV Performance
DocumentAN-0041
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ZeGage Pro & ZeGage Pro HR Operating Manual
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Optical Profiler Accessory Guide (for NewView 8/9000, & Nexview/NX2)
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Mx™ Quick-Start Guide
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Mx™ Reference Guide
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Mx™ Remote Access Guide
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Mx™ Surface Texture Parameters
Title
Document
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ZeGage Pro & ZeGage Pro HR Operating Manual
DocumentOMP-0619B
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Optical Profiler Accessory Guide (for NewView 8/9000, & Nexview/NX2)
DocumentOMP-0594M
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Mx™ Quick-Start Guide
DocumentOMP-0570D
Download Download
Mx™ Reference Guide
DocumentOMP-0550D
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Mx™ Remote Access Guide
DocumentOMP-0600A
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Mx™ Surface Texture Parameters
DocumentOMP-0608C
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