ZeGage Pro

ZeGage Pro

ZeGage™ Pro

Production Ready 3D Optical Profiler System

ZeGage Pro HR 3D Optical Profiler

The ZeGage™ Pro and ZeGage™ Pro HR 3D optical profilers provide non-contact measurement and characterization of micro- and nano-scale features of many types of surfaces, ensuring quality control and process monitoring in your manufacturing environment.

Our industry-leading ZeGage Pro-series sets the standard for performance, ease of use, flexibility, and precision of benchtop-class industrial non-contact surface profilers. Built on ZYGO’s proprietary CSI technology, the ZeGage Pro delivers innovative technologies to enable precise, reliable, simple, and confident surface metrology.

Exclusive capabilities include SureScan™ technology for vibration robust metrology,  Part Finder, and Smart Setup for simplified part setup and optimized measurements.  It’s never been simpler to measure a wide variety of surfaces and parts, quickly and easily.

Read more to see how the ZeGage™ Pro systems' power, versatility, and value can benefit you.

  • MORE INFO
  • BROCHURES &
    SPEC SHEETS
  • APPLICATION
    NOTES
  • MANUALS
  • TECH PAPERS
  • VIDEOS

 Powerful Performance

  • Proprietary non-contact measurement technology is enhanced with SureScan™ technology for low sensitivity to vibration and easy placement anywhere within your facility.
  • Quantitative surface metrology with nanometer-level precision provides superior gage capability.
  • High resolution 1.9 million pixel image sensor provides fast areal measurements in seconds, for excellent surface detail and visualization.
  • Fully-automated measurement sequences and field stitching enable high resolution inspection of large areas. (Requires optional motorized part stage.)

Versatility

  • Measures a wide variety of surface materials and parameters, including 2D and 3D profiling of surface texture, form, step-height and more.
  • Included Mx software provides comprehensive tools for surface data visualization, analysis and reporting.
  • Expand the measurement range of your investment with accessories that include objective turrets, manual and motorized sample stages, and optional software modules for film topography profiling and 2D analysis using Cognex VisionPro®.

Productivity and Value

  • Smart Setup technology reduces training time, and shortens part changeover by automating part finding, light setting, and scan configuration. Smart Setup usually results in a first data map within 1 minute of placing the sample under the objective.
  • Cost-effective price-to-performance ratio compares favorably to alternative systems, including mechanical contact stylus profilers.
  • Non-contact method means no consumable replacement costs to worry about.
  • Compact, vibration-tolerant SureScan™ technology for easy integration anywhere in your facility.
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TitleZeGage™ Pro
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Title3D Optical Profiler Accessory Guide
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Title3D Optical Profilers
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TitleNexview™ NX2, NewView™ 9000, ZeGage™ Pro Objectives
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TitleZeGage™ Pro
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TitleZeGage™ Pro HR
Title
Document
Download Link
ZeGage™ Pro
DocumentBrochure
Download Link Download
3D Optical Profiler Accessory Guide
DocumentBrochure
Download Link Download
3D Optical Profilers
DocumentBrochure
Download Link Download
Nexview™ NX2, NewView™ 9000, ZeGage™ Pro Objectives
DocumentBrochure
Download Link Download
ZeGage™ Pro
DocumentSpecifications
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ZeGage™ Pro HR
DocumentSpecifications
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TitleForm and Roughness
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TitleMx™ Software Films Analysis
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TitleMeasuring Sub-Angstrom Surface Texture
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TitleMeasuring Dynamic MEMS Devices
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TitleIdentifying and Controlling Vibration
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TitlePSD Analysis
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TitleVision Software Suite
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TitleABS Geometry and MetroPro® Calculations
Title
Document
Download Link
Form and Roughness
DocumentAB-0100
Download Link Download
Mx™ Software Films Analysis
DocumentAN-0001
Download Link Download
Measuring Sub-Angstrom Surface Texture
DocumentAN-0002
Download Link Download
Measuring Dynamic MEMS Devices
DocumentAN-0003
Download Link Download
Identifying and Controlling Vibration
DocumentAN-0006
Download Link Download
PSD Analysis
DocumentAN-0009
Download Link Download
Vision Software Suite
DocumentAN-0011
Download Link Download
ABS Geometry and MetroPro® Calculations
DocumentAN-0012
Download Link Download
Getting the Most from the Advanced Texture Application
DocumentAN-0013
Download Link Download
Filtering on the NewView™
DocumentAN-0014
Download Link Download
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TitleZeGage Pro & ZeGage Pro HR Operating Manual
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TitleOptical Profiler Accessory Guide (for NewView 8/9000, & Nexview/NX2)
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TitleMx™ Quick-Start Guide
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TitleMx™ Reference Guide
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TitleMx™ Remote Access Guide
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TitleMx™ Surface Texture Parameters
Title
Document
Download Link
ZeGage Pro & ZeGage Pro HR Operating Manual
DocumentOMP-0619B
Download Link Download
Optical Profiler Accessory Guide (for NewView 8/9000, & Nexview/NX2)
DocumentOMP-0594J
Download Link Download
Mx™ Quick-Start Guide
DocumentOMP-0570D
Download Link Download
Mx™ Reference Guide
DocumentOMP-0550D
Download Link Download
Mx™ Remote Access Guide
DocumentOMP-0600A
Download Link Download
Mx™ Surface Texture Parameters
DocumentOMP-0608C
Download Link Download
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Title3D Optical Profilers Are Enabling Reliable Engine Lightweighting
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TitleA new class of wide-field objectives for 3D interference microscopy
img1
TitleAccurate, repetitive, linear motion from biased piezoelectric actuators
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TitleAdvanced Metrology for Energy Efficiency
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TitleAdvances in optical metrology
img1
TitleAngle-resolved three-dimensional analysis of surface films by coherence scanning interferometry
img1
TitleApplications of model-based transparent surface films analysis using coherence scanning interferometry
img1
TitleCalibration of the amplification coefficient in interference microscopy by means of a wavelength standard
Title
Document
Download Link
3D Optical Profilers Are Enabling Reliable Engine Lightweighting
DocumentArticle
Download Link Download
A new class of wide-field objectives for 3D interference microscopy
DocumentTechnical Paper
Download Link Download
Accurate, repetitive, linear motion from biased piezoelectric actuators
DocumentTechnical Paper
Download Link Download
Advanced Metrology for Energy Efficiency
DocumentTechnical Paper
Download Link Download
Advances in optical metrology
DocumentTechnical Paper
Download Link Download
Angle-resolved three-dimensional analysis of surface films by coherence scanning interferometry
DocumentTechnical Paper
Download Link Download
Applications of model-based transparent surface films analysis using coherence scanning interferometry
DocumentTechnical Paper
Download Link Download
Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard
DocumentTechnical Paper
Download Link Download
Challenges and solutions in the optical measurement of aspheres
DocumentTechnical Paper
Download Link Download
Characterization of materials and film stacks for accurate surface topography measurement using a white-light optical profiler
DocumentTechnical Paper
Download Link Download

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