Large Aperture Systems

Expanded apertures for large format optics metrology

24" Large Aperture Interferometer System
24" Large Aperture Interferometer System

ZYGO's horizontal-axis beam expanders increase the native aperture size of a 4” interferometer to 12”, 18”, 24” or even 32” enabling the precision of interferometry in large format optical component and optical system qualification.

Horizontal large aperture systems offer the unique capability to maintain two independent metrology channels; one of the native 4” interferometer aperture, and the other an expanded beam up to 32”, enabling the flexibility of two interferometers in one.  When configured with the proper accessories the Large Aperture Systems can be used to measure both surface form and transmitted wavefront quality.

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32" Large Aperture Interferometer System
32" Large Aperture Interferometer System

ZYGO Beam Expanders have been deployed around the world to satisfy the most demanding and precise applications for large-format optics metrology.  Decades of experience in beam expander development and internal production of key components like super-precise reference flats ensure your application need is met and supported well into the future.

The Large Aperture System components can be purchased separately from the interferometer mainframe. Contact your local ZYGO representative for assistance in configuring the system to meet your metrology needs.

Key Features

  • Expanded aperture sizes 12”, 18”, 24” and 32”
  • Dual channel 4” and expanded leg for added flexibility with both large and small apertures accessible
  • Designed for high-resolution, each beam expander maintains ITF for interferometer systems up to 3.4k x 3.4k
  • Support QPSI vibration robust acquisition
  • Available in operating wavelengths from 633 nm to 1. 55 µm
  • A range of optical and mechanical accessories are available for each aperture size, including reference optics up to λ/25 PVr
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TitleLaser Interferometer Accessory Guide
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TitleInteractive Transmission Sphere Selector
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TitleInterferogram Interpretation and Evaluation Guide
Title
Document
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Laser Interferometer Accessory Guide
DocumentBrochure
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Interactive Transmission Sphere Selector
DocumentInteractive Document
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Interferogram Interpretation and Evaluation Guide
DocumentReference Guide
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TitleMetrology in Production Environments - QPSI Technology
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TitleMeasurement of Aspheric Surfaces
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TitleDetermining Asphere Measurability
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TitleGrazing Incidence Testing
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TitleInterferogram Scale Factor
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TitleSilver Overcoat Spray
img1
TitleTesting Cylindrical Surfaces with Computer Generated Holograms
img1
TitleFringe Analysis versus Phase Measuring Interferometry
Title
Document
Download Link
Metrology in Production Environments - QPSI Technology
DocumentAB-0102
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Measurement of Aspheric Surfaces
DocumentAN-0007
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Determining Asphere Measurability
DocumentAN-0008
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Grazing Incidence Testing
DocumentAN-0010
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Interferogram Scale Factor
DocumentAN-0015
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Silver Overcoat Spray
DocumentAN-0016
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Testing Cylindrical Surfaces with Computer Generated Holograms
DocumentAN-0017
Download Link Download
Fringe Analysis versus Phase Measuring Interferometry
DocumentAN-0018
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Finite Conjugate Lens Testing
DocumentAN-0019
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Testing Cylindrical Optics
DocumentAN-0020
Download Link Download
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TitleLarge Aperture (12/18/24/32-Inch) System Guide
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TitlePVr Application
Title
Document
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Large Aperture (12/18/24/32-Inch) System Guide
DocumentOMP-0579H
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PVr Application
DocumentOMP-0548A
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img1
TitleSolutions for environmentally robust interferometric optical testing
img1
Title101 Frame Algorithm For Phase Shifting Interferometry
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TitleA next-generation optical surface form inspection instrument for high-volume production applications
img1
TitleA review of selected topics in interferometric optical metrology
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TitleAbsolute distance measurements using FTPSI with a widely tunable IR laser
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TitleAbsolute Interferometric Testing of Spherical Surfaces
img1
TitleAbsolute Measurement of Rotationally Symmetrical Aspheric Surfaces
img1
TitleAdjustable coherence depth in a geometrically-desensitized interferometer
Title
Document
Download Link
Solutions for environmentally robust interferometric optical testing
DocumentTechnical Paper
Download Link Download
101 Frame Algorithm For Phase Shifting Interferometry
DocumentTechnical Paper
Download Link Download
A next-generation optical surface form inspection instrument for high-volume production applications
DocumentTechnical Paper
Download Link Download
A review of selected topics in interferometric optical metrology
DocumentTechnical Paper
Download Link Download
Absolute distance measurements using FTPSI with a widely tunable IR laser
DocumentTechnical Paper
Download Link Download
Absolute Interferometric Testing of Spherical Surfaces
DocumentTechnical Paper
Download Link Download
Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
DocumentTechnical Paper
Download Link Download
Adjustable coherence depth in a geometrically-desensitized interferometer
DocumentTechnical Paper
Download Link Download
Advances in optical metrology
DocumentTechnical Paper
Download Link Download
Applications of optical coherence in interferometric metrology
DocumentTechnical Paper
Download Link Download

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