Verifire™ MST

Simultaneous Multi-Surface Test Interferometer

Verifire™ MST Laser InterferometerSimplify the complex – multiple surfaces create complex fringe patterns, the Verifire™ MST uses patented wavelength-shifting technology to acquire phase data from multiple surfaces simultaneously.  Report key metrics from individual surfaces of parallel windows, transmitted wavefront, as well as precise surface-to-surface information like total thickness variation (TTV), wedge and even material inhomogeneity.

The Verifire™ MST addresses demanding applications like mobile device display glass, data storage disks and semiconductor wafers with precise surface and thickness variation metrology for test parts as thin as 0.5 mm. 

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The Verifire™ MST provides high precision measurements of surface form and transmitted wavefront of optical components and lens systems. It is the only commercial interferometer system that can measure multiple surfaces simultaneously, maintaining relative surface information and providing quick and simple results from multiple surfaces.

Key Features

  • Simultaneous surface and wavefront characterization and precise surface-to-surface metrology like TTV and wedge
  • Surface and thickness qualification of test parts as thin as 0.5 mm thickness
  • Wide range of lateral resolution including pixel-limited optical designs to deliver optimum ITF
    • 1.2k x 1.2k (includes discrete zoom turret for optical zoom up to 3X)
    • 2.3k x 2.3k
    • 3.4k x 3.4k
  • Available in operating wavelengths from 633 nm to 1.053 µm, 1.064 µm and 1.55 µm
  • QPSI™ acquisition technology, available only from ZYGO, enables reliable measurements in vibration-prone environments – now available in wavelength shifting and multi-surface FTPSI acquisition
  • Ring of Fire artifact reduction source included standard – eliminates bullseyes and reduces coherent noise

 

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TitleVerifire™ MST
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TitleInteractive Transmission Sphere Selector
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TitleInterferogram Interpretation and Evaluation Guide
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TitleLaser Interferometer Accessory Guide
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TitleTransmission Sphere Selection Guide
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TitleTypical Interferometer Setups Guide
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TitleHorizontal Radius Metrology Specs
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TitleTransmission Spheres Specs
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TitleVerifire MST
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TitleVerifire™ HD MST
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TitleVerifire™ HDX MST
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TitleVerifire™ MST IR
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TitleVerifire™ MST Plus
Title
Document
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Verifire™ MST
DocumentBrochure
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Interactive Transmission Sphere Selector
DocumentInteractive Document
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Interferogram Interpretation and Evaluation Guide
DocumentReference Guide
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Laser Interferometer Accessory Guide
DocumentBrochure
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Transmission Sphere Selection Guide
DocumentBrochure
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Typical Interferometer Setups Guide
DocumentBrochure
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Horizontal Radius Metrology Specs
DocumentSpecifications
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Transmission Spheres Specs
DocumentSpecifications
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Verifire MST
DocumentSpecifications
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Verifire™ HD MST
DocumentSpecifications
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Verifire™ HDX MST
DocumentSpecifications
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Verifire™ MST IR
DocumentSpecifications
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Verifire™ MST Plus
DocumentSpecifications
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TitleMetrology in Production Environments - QPSI Technology
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TitleMeasurement of Aspheric Surfaces
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TitleDetermining Asphere Measurability
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TitleGrazing Incidence Testing
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TitleInterferogram Scale Factor
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TitleSilver Overcoat Spray
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TitleTesting Cylindrical Surfaces with Computer Generated Holograms
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TitleFringe Analysis versus Phase Measuring Interferometry
Title
Document
Download Link
Metrology in Production Environments - QPSI Technology
DocumentAB-0102
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Measurement of Aspheric Surfaces
DocumentAN-0007
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Determining Asphere Measurability
DocumentAN-0008
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Grazing Incidence Testing
DocumentAN-0010
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Interferogram Scale Factor
DocumentAN-0015
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Silver Overcoat Spray
DocumentAN-0016
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Testing Cylindrical Surfaces with Computer Generated Holograms
DocumentAN-0017
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Fringe Analysis versus Phase Measuring Interferometry
DocumentAN-0018
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Finite Conjugate Lens Testing
DocumentAN-0019
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Testing Cylindrical Optics
DocumentAN-0020
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TitleAligning a DynaFlect Transmission Flat
img1
TitleAperture Converter - Installation and Alignment Procedure
img1
TitleInterferogram Interpretation and Evaluation
img1
TitleLaser Interferometer Accessory Guide
Title
Document
Download Link
Aligning a DynaFlect Transmission Flat
DocumentOMP-0454A
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Aperture Converter - Installation and Alignment Procedure
DocumentOMP-0272C
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Interferogram Interpretation and Evaluation
DocumentInterEval.pdf
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Laser Interferometer Accessory Guide
DocumentOMP-0463AM
Download Link Download
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TitleSolutions for environmentally robust interferometric optical testing
img1
Title101 Frame Algorithm For Phase Shifting Interferometry
img1
TitleA next-generation optical surface form inspection instrument for high-volume production applications
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TitleA review of selected topics in interferometric optical metrology
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TitleAbsolute distance measurements using FTPSI with a widely tunable IR laser
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TitleAbsolute Interferometric Testing of Spherical Surfaces
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TitleAbsolute Measurement of Rotationally Symmetrical Aspheric Surfaces
img1
TitleAchieving Precision Radius Metrology for Large Optics
Title
Document
Download Link
Solutions for environmentally robust interferometric optical testing
DocumentTechnical Paper
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101 Frame Algorithm For Phase Shifting Interferometry
DocumentTechnical Paper
Download Link Download
A next-generation optical surface form inspection instrument for high-volume production applications
DocumentTechnical Paper
Download Link Download
A review of selected topics in interferometric optical metrology
DocumentTechnical Paper
Download Link Download
Absolute distance measurements using FTPSI with a widely tunable IR laser
DocumentTechnical Paper
Download Link Download
Absolute Interferometric Testing of Spherical Surfaces
DocumentTechnical Paper
Download Link Download
Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
DocumentTechnical Paper
Download Link Download
Achieving Precision Radius Metrology for Large Optics
DocumentTechnical Paper
Download Link Download
Adjustable coherence depth in a geometrically-desensitized interferometer
DocumentTechnical Paper
Download Link Download
Advances in optical metrology
DocumentTechnical Paper
Download Link Download

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