Verifire™ MST

Simultaneous Multi-Surface Test Interferometer

Verifire™ MST Laser InterferometerSimplify the complex – multiple surfaces create complex fringe patterns, the Verifire™ MST uses patented wavelength-shifting technology to acquire phase data from multiple surfaces simultaneously.  Report key metrics from individual surfaces of parallel windows, transmitted wavefront, as well as precise surface-to-surface information like total thickness variation (TTV), wedge and even material inhomogeneity.

The Verifire™ MST addresses demanding applications like mobile device display glass, data storage disks and semiconductor wafers with precise surface and thickness variation metrology for test parts as thin as 0.5 mm. 

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The Verifire™ MST provides high precision measurements of surface form and transmitted wavefront of optical components and lens systems. It is the only commercial interferometer system that can measure multiple surfaces simultaneously, maintaining relative surface information and providing quick and simple results from multiple surfaces.

Key Features

  • Simultaneous surface and wavefront characterization and precise surface-to-surface metrology like TTV and wedge
  • Surface and thickness qualification of test parts as thin as 0.5 mm thickness
  • Wide range of lateral resolution including pixel-limited optical designs to deliver optimum ITF
    • 1.2k x 1.2k (includes discrete zoom turret for optical zoom up to 3X)
    • 2.3k x 2.3k
    • 3.4k x 3.4k
  • Available in operating wavelengths from 633 nm to 1.053 µm, 1.064 µm and 1.55 µm
  • QPSI™ acquisition technology, available only from ZYGO, enables reliable measurements in vibration-prone environments – now available in wavelength shifting and multi-surface FTPSI acquisition
  • Ring of Fire artifact reduction source included standard – eliminates bullseyes and reduces coherent noise

 

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TitleLaser Interferometers
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TitleVerifire™ MST
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TitleVerifire™ MST+
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TitleVerifire™ HD-MST
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TitleVerifire™ HDX-MST
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TitleVerifire™ MST IR
img1
TitleLaser Interferometer Accessory Guide
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TitleInteractive Transmission Sphere Selector
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TitleInterferogram Interpretation and Evaluation Guide
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TitleHorizontal Radius Metrology Specs
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TitleTransmission Sphere Selection Guide
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TitleTypical Interferometer Setups Guide
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TitleTransmission Spheres Specs
Title
Document
Download Link
Laser Interferometers
DocumentBrochure
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Verifire™ MST
DocumentBrochure
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Verifire™ MST+
DocumentSpecifications
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Verifire™ HD-MST
DocumentSpecifications
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Verifire™ HDX-MST
DocumentSpecifications
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Verifire™ MST IR
DocumentSpecifications
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Laser Interferometer Accessory Guide
DocumentBrochure
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Interactive Transmission Sphere Selector
DocumentInteractive Document
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Interferogram Interpretation and Evaluation Guide
DocumentReference Guide
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Horizontal Radius Metrology Specs
DocumentSpecifications
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Transmission Sphere Selection Guide
DocumentBrochure
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Typical Interferometer Setups Guide
DocumentBrochure
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Transmission Spheres Specs
DocumentSpecifications
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TitleMetrology in Production Environments - QPSI Technology
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TitleMeasurement of Aspheric Surfaces
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TitleDetermining Asphere Measurability
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TitleGrazing Incidence Testing
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TitleInterferogram Scale Factor
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TitleSilver Overcoat Spray
img1
TitleTesting Cylindrical Surfaces with Computer Generated Holograms
img1
TitleFringe Analysis versus Phase Measuring Interferometry
Title
Document
Download Link
Metrology in Production Environments - QPSI Technology
DocumentAB-0102
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Measurement of Aspheric Surfaces
DocumentAN-0007
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Determining Asphere Measurability
DocumentAN-0008
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Grazing Incidence Testing
DocumentAN-0010
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Interferogram Scale Factor
DocumentAN-0015
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Silver Overcoat Spray
DocumentAN-0016
Download Link Download
Testing Cylindrical Surfaces with Computer Generated Holograms
DocumentAN-0017
Download Link Download
Fringe Analysis versus Phase Measuring Interferometry
DocumentAN-0018
Download Link Download
Finite Conjugate Lens Testing
DocumentAN-0019
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Testing Cylindrical Optics
DocumentAN-0020
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TitleVerifire™ MST 633 nm
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TitleVerifire™ 633 nm MST Plus, HD MST, HDX MST
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TitleVerifire™ MST 1550 nm
img1
TitleAligning a DynaFlect Transmission Flat
img1
TitleAperture Converter - Installation and Alignment Procedure
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TitleInterferogram Interpretation and Evaluation
img1
TitleLaser Interferometer Accessory Guide
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TitleLaser Interferometer Quick Setup Guide
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TitleMST Custom Cavity Application
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TitleMST PSurf & MST PHom Applications
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TitleMST Two-Surface Application
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TitlePVr Application
img1
TitleTransmission Sphere Selection Guide
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TitleTransmission Sphere Selector (Interactive Excel® Document)
img1
TitleMx™ Quick-Start Guide
Title
Document
Download Link
Verifire™ MST 633 nm
DocumentOMP-0515E
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Verifire™ 633 nm MST Plus, HD MST, HDX MST
DocumentOMP-0628A
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Verifire™ MST 1550 nm
DocumentOMP-0481A
Download Link Download
Aligning a DynaFlect Transmission Flat
DocumentOMP-0454A
Download Link Download
Aperture Converter - Installation and Alignment Procedure
DocumentOMP-0272C
Download Link Download
Interferogram Interpretation and Evaluation
DocumentInterEval.pdf
Download Link Download
Laser Interferometer Accessory Guide
DocumentOMP-0463AM
Download Link Download
Laser Interferometer Quick Setup Guide
DocumentOMP-0584A
Download Link Download
MST Custom Cavity Application
DocumentOMP-0487A
Download Link Download
MST PSurf & MST PHom Applications
DocumentOMP-0486B
Download Link Download
MST Two-Surface Application
DocumentOMP-0483A
Download Link Download
PVr Application
DocumentOMP-0548A
Download Link Download
Transmission Sphere Selection Guide
DocumentTS_Selection.pdf
Download Link Download
Transmission Sphere Selector (Interactive Excel® Document)
DocumentOMP-0495E
Download Link Download
Mx™ Quick-Start Guide
DocumentOMP-0570D
Download Link Download
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TitleSolutions for environmentally robust interferometric optical testing
img1
Title101 Frame Algorithm For Phase Shifting Interferometry
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TitleA next-generation optical surface form inspection instrument for high-volume production applications
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TitleA review of selected topics in interferometric optical metrology
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TitleAbsolute distance measurements using FTPSI with a widely tunable IR laser
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TitleAbsolute Interferometric Testing of Spherical Surfaces
img1
TitleAbsolute Measurement of Rotationally Symmetrical Aspheric Surfaces
img1
TitleAdjustable coherence depth in a geometrically-desensitized interferometer
Title
Document
Download Link
Solutions for environmentally robust interferometric optical testing
DocumentTechnical Paper
Download Link Download
101 Frame Algorithm For Phase Shifting Interferometry
DocumentTechnical Paper
Download Link Download
A next-generation optical surface form inspection instrument for high-volume production applications
DocumentTechnical Paper
Download Link Download
A review of selected topics in interferometric optical metrology
DocumentTechnical Paper
Download Link Download
Absolute distance measurements using FTPSI with a widely tunable IR laser
DocumentTechnical Paper
Download Link Download
Absolute Interferometric Testing of Spherical Surfaces
DocumentTechnical Paper
Download Link Download
Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
DocumentTechnical Paper
Download Link Download
Adjustable coherence depth in a geometrically-desensitized interferometer
DocumentTechnical Paper
Download Link Download
Advances in optical metrology
DocumentTechnical Paper
Download Link Download
Applications of optical coherence in interferometric metrology
DocumentTechnical Paper
Download Link Download

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