Verifire™ MST: Simultaneous Multi-Surface Test Interferometer

Simultaneous Multi-Surface Test Interferometer

Verifire™ MST Laser InterferometerSimplify the complex – multiple surfaces create complex fringe patterns, the Verifire™ MST uses patented wavelength-shifting technology to acquire phase data from multiple surfaces simultaneously.  Report key metrics from individual surfaces of parallel windows, transmitted wavefront, as well as precise surface-to-surface information like total thickness variation (TTV), wedge and even material inhomogeneity.

The Verifire™ MST addresses demanding applications like mobile device display glass, data storage disks and semiconductor wafers with precise surface and thickness variation metrology for test parts as thin as 0.5 mm. 

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The Verifire™ MST provides high precision measurements of surface form and transmitted wavefront of optical components and lens systems. It is the only commercial interferometer system that can measure multiple surfaces simultaneously, maintaining relative surface information and providing quick and simple results from multiple surfaces.

Key Features

  • Simultaneous surface and wavefront characterization and precise surface-to-surface metrology like TTV and wedge
  • Surface and thickness qualification of test parts as thin as 0.5 mm thickness
  • Wide range of lateral resolution including pixel-limited optical designs to deliver optimum ITF
    • 1.2k x 1.2k (includes discrete zoom turret for optical zoom up to 3X)
    • 2.3k x 2.3k
    • 3.4k x 3.4k
  • Available in operating wavelengths from 633 nm to 1.053 µm, 1.064 µm and 1.55 µm
  • QPSI™ acquisition technology, available only from ZYGO, enables reliable measurements in vibration-prone environments – now available in wavelength shifting and multi-surface FTPSI acquisition
  • Ring of Fire artifact reduction source included standard – eliminates bullseyes and reduces coherent noise

 

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Laser Interferometers
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Verifire™ MST Plus
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Verifire™ MST+
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Verifire™ HD-MST
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Verifire™ HDX-MST
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Verifire™ MST IR
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Laser Interferometer Accessory Guide
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Interactive Transmission Sphere Selector
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Interferogram Interpretation and Evaluation Guide
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Horizontal Radius Metrology Specs
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Transmission Sphere Selection Guide
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Typical Interferometer Setups Guide
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Transmission Spheres Specs
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Service Brochure
Title
Document
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Laser Interferometers
DocumentBrochure
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Verifire™ MST Plus
DocumentSpecifications
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Verifire™ MST+
DocumentSpecifications
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Verifire™ HD-MST
DocumentSpecifications
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Verifire™ HDX-MST
DocumentSpecifications
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Verifire™ MST IR
DocumentSpecifications
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Laser Interferometer Accessory Guide
DocumentBrochure
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Interactive Transmission Sphere Selector
DocumentInteractive Document
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Interferogram Interpretation and Evaluation Guide
DocumentReference Guide
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Horizontal Radius Metrology Specs
DocumentSpecifications
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Transmission Sphere Selection Guide
DocumentSpecifications
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Typical Interferometer Setups Guide
DocumentBrochure
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Transmission Spheres Specs
DocumentSpecifications
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Service Brochure
DocumentBrochure
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Measurement of Aspheric Surfaces
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Determining Asphere Measurability
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Grazing Incidence Testing
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Interferometer Scale Factor
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Silver Overcoat Spray
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Testing Cylindrical Surfaces with Computer Generated Holograms
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PMI vs Fringe Analysis
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Finite Conjugate Lens Testing
Title
Document
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Measurement of Aspheric Surfaces
DocumentAN-0007
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Determining Asphere Measurability
DocumentAN-0008
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Grazing Incidence Testing
DocumentAN-0010
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Interferometer Scale Factor
DocumentAN-0015
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Silver Overcoat Spray
DocumentAN-0016
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Testing Cylindrical Surfaces with Computer Generated Holograms
DocumentAN-0017
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PMI vs Fringe Analysis
DocumentAN-0018
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Finite Conjugate Lens Testing
DocumentAN-0019
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Testing Cylindrical Optics
DocumentAN-0020
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MetroPro® Cylinder Tools
DocumentAN-0021
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Verifire™ MST 633 nm
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Verifire™ 633 nm MST Plus, HD MST, HDX MST
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Verifire™ MST 1550 nm
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Interferogram Interpretation and Evaluation
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Laser Interferometer Accessory Guide
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Laser Interferometer Accessory Instructions
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Laser Interferometer Alignment and Measurement Setup
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Laser Interferometer Quick Setup Guide
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Transmission Sphere Selection Guide
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Transmission Sphere Selector (Interactive Excel® Document)
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Mx™ Quick-Start Guide
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Mx™ Reference Guide
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Mx™ Remote Access Guide
Title
Document
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Verifire™ MST 633 nm
DocumentOMP-0515E
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Verifire™ 633 nm MST Plus, HD MST, HDX MST
DocumentOMP-0628B
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Verifire™ MST 1550 nm
DocumentOMP-0632B
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Interferogram Interpretation and Evaluation
DocumentInterEval.pdf
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Laser Interferometer Accessory Guide
DocumentOMP-0463AN
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Laser Interferometer Accessory Instructions
DocumentOMP-0634A
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Laser Interferometer Alignment and Measurement Setup
DocumentOMP-0635A
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Laser Interferometer Quick Setup Guide
DocumentOMP-0584A
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Transmission Sphere Selection Guide
DocumentTS_Selection.pdf
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Transmission Sphere Selector (Interactive Excel® Document)
DocumentOMP-0495E
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Mx™ Quick-Start Guide
DocumentOMP-0570D
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Mx™ Reference Guide
DocumentOMP-0550D
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Mx™ Remote Access Guide
DocumentOMP-0600A
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Laser damage properties of Al2O3/MgF2 antireflection coatings on large curved substrates at 248 nm
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Solutions for environmentally robust interferometric optical testing
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101 Frame Algorithm For Phase Shifting Interferometry
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A next-generation optical surface form inspection instrument for high-volume production applications
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A review of selected topics in interferometric optical metrology
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Absolute distance measurements using FTPSI with a widely tunable IR laser
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Absolute Interferometric Testing of Spherical Surfaces
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Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
Title
Document
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Laser damage properties of Al2O3/MgF2 antireflection coatings on large curved substrates at 248 nm
DocumentArticle
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Solutions for environmentally robust interferometric optical testing
DocumentTechnical Paper
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101 Frame Algorithm For Phase Shifting Interferometry
DocumentTechnical Paper
Download Download
A next-generation optical surface form inspection instrument for high-volume production applications
DocumentTechnical Paper
Download Download
A review of selected topics in interferometric optical metrology
DocumentTechnical Paper
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Absolute distance measurements using FTPSI with a widely tunable IR laser
DocumentTechnical Paper
Download Download
Absolute Interferometric Testing of Spherical Surfaces
DocumentTechnical Paper
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Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
DocumentTechnical Paper
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Adjustable coherence depth in a geometrically-desensitized interferometer
DocumentTechnical Paper
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Advances in optical metrology
DocumentTechnical Paper
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