Verifire™ XL

Large-Aperture Downward-Looking Interferometer

Large aperture, small footprint – The Verifire XL is a turnkey interferometer workstation for easy testing of plano optics up to 300 mm diameter.

This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing.

The compact footprint, with built-in vibration isolation and controller monitor stand, requires minimal production floor space.

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Light-weighted Optic Measured by Verifire XL Interferometer System

Stand-alone large aperture workstation for measuring plano optical surface form up to 12 inches (300 mm) in diameter such as mirrors, windows, semiconductor wafers, wafer chucks and blocked flats.

Key Features

12" (300 mm) aperture in downward-looking orientation for easy part handling and alignment
Turnkey, self-contained system including interferometer mainframe, passive vibration isolation system, test part alignment stage and 1/15th wave PVr transmission flat (TF)
Compact footprint minimizes consumption of valuable floor space
Integrated vibration isolation and QPSI™ technology for reliable measurements in production environments