Verifire™ XL
Large-Aperture Downward-Looking Interferometer
Large aperture, small footprint – The Verifire XL is a turnkey interferometer workstation for easy testing of plano optics up to 300 mm diameter.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing.
The compact footprint, with built-in vibration isolation and controller monitor stand, requires minimal production floor space.
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Stand-alone large aperture workstation for measuring plano optical surface form up to 12 inches (300 mm) in diameter such as mirrors, windows, semiconductor wafers, wafer chucks and blocked flats.
Key Features
- 12" (300 mm) aperture in downward-looking orientation for easy part handling and alignment
- Turnkey, self-contained system including interferometer mainframe, passive vibration isolation system, test part alignment stage and 1/15th wave PVr transmission flat (TF)
- Compact footprint minimizes consumption of valuable floor space
- Integrated vibration isolation and QPSI™ technology for reliable measurements in production environments
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Metrology in Production Environments - QPSI Technology

Measurement of Aspheric Surfaces

Determining Asphere Measurability

Grazing Incidence Testing

Interferometer Scale Factor

Silver Overcoat Spray

Testing Cylindrical Surfaces with Computer Generated Holograms

PMI vs Fringe Analysis
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Interferogram Interpretation and Evaluation

Laser Interferometer Accessory Guide

Laser Interferometer Accessory Instructions

Laser Interferometer Alignment and Measurement Setup

Verifire XL Interferometer Operating Manual

Laser Interferometer Quick Setup Guide
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Laser damage properties of Al2O3/MgF2 antireflection coatings on large curved substrates at 248 nm

Solutions for environmentally robust interferometric optical testing

101 Frame Algorithm For Phase Shifting Interferometry

A next-generation optical surface form inspection instrument for high-volume production applications

A review of selected topics in interferometric optical metrology

Absolute distance measurements using FTPSI with a widely tunable IR laser

Absolute Interferometric Testing of Spherical Surfaces

Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
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Laser damage properties of Al2O3/MgF2 antireflection coatings on large curved substrates at 248 nm
DocumentArticle
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Solutions for environmentally robust interferometric optical testing
DocumentTechnical Paper
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A next-generation optical surface form inspection instrument for high-volume production applications
DocumentTechnical Paper
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A review of selected topics in interferometric optical metrology
DocumentTechnical Paper
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Absolute distance measurements using FTPSI with a widely tunable IR laser
DocumentTechnical Paper
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Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
DocumentTechnical Paper
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Adjustable coherence depth in a geometrically-desensitized interferometer
DocumentTechnical Paper
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