Verifire™ XL
Large-Aperture Downward-Looking Interferometer
Large aperture, small footprint – The Verifire XL is a turnkey interferometer workstation for easy testing of plano optics up to 300 mm diameter.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing.
The compact footprint, with built-in vibration isolation and controller monitor stand, requires minimal production floor space.
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Stand-alone large aperture workstation for measuring plano optical surface form up to 12 inches (300 mm) in diameter such as mirrors, windows, semiconductor wafers, wafer chucks and blocked flats.
Key Features
- 12" (300 mm) aperture in downward-looking orientation for easy part handling and alignment
- Turnkey, self-contained system including interferometer mainframe, passive vibration isolation system, test part alignment stage and 1/15th wave PVr transmission flat (TF)
- Compact footprint minimizes consumption of valuable floor space
- Integrated vibration isolation and QPSI™ technology for reliable measurements in production environments
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Metrology in Production Environments - QPSI Technology
Measurement of Aspheric Surfaces
Determining Asphere Measurability
Grazing Incidence Testing
Interferometer Scale Factor
Silver Overcoat Spray
Testing Cylindrical Surfaces with Computer Generated Holograms
PMI vs Fringe Analysis
Title
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Interferogram Interpretation and Evaluation
Laser Interferometer Accessory Guide
Laser Interferometer Accessory Instructions
Laser Interferometer Alignment and Measurement Setup
Verifire XL Interferometer Operating Manual
Laser Interferometer Quick Setup Guide
Title
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Laser damage properties of Al2O3/MgF2 antireflection coatings on large curved substrates at 248 nm
Solutions for environmentally robust interferometric optical testing
101 Frame Algorithm For Phase Shifting Interferometry
A next-generation optical surface form inspection instrument for high-volume production applications
A review of selected topics in interferometric optical metrology
Absolute distance measurements using FTPSI with a widely tunable IR laser
Absolute Interferometric Testing of Spherical Surfaces
Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
Title
Document
Download
Laser damage properties of Al2O3/MgF2 antireflection coatings on large curved substrates at 248 nm
DocumentArticle
Download Download
Solutions for environmentally robust interferometric optical testing
DocumentTechnical Paper
Download Download
A next-generation optical surface form inspection instrument for high-volume production applications
DocumentTechnical Paper
Download Download
A review of selected topics in interferometric optical metrology
DocumentTechnical Paper
Download Download
Absolute distance measurements using FTPSI with a widely tunable IR laser
DocumentTechnical Paper
Download Download
Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
DocumentTechnical Paper
Download Download
Adjustable coherence depth in a geometrically-desensitized interferometer
DocumentTechnical Paper
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