Verifire™ XL

Large-Aperture Downward-Looking Interferometer

Large aperture, small footprint – The Verifire XL is a turnkey interferometer workstation for easy testing of plano optics up to 300 mm diameter.

This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing.

The compact footprint, with built-in vibration isolation and controller monitor stand, requires minimal production floor space.

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    SPEC SHEETS
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    NOTES
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  • TECH PAPERS
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Light-weighted Optic Measured by Verifire XL Interferometer System

Stand-alone large aperture workstation for measuring plano optical surface form up to 12 inches (300 mm) in diameter such as mirrors, windows, semiconductor wafers, wafer chucks and blocked flats.

Key Features

  • 12" (300 mm) aperture in downward-looking orientation for easy part handling and alignment
  • Turnkey, self-contained system including interferometer mainframe, passive vibration isolation system, test part alignment stage and 1/15th wave PVr transmission flat (TF)
  • Compact footprint minimizes consumption of valuable floor space
  • Integrated vibration isolation and QPSI™ technology for reliable measurements in production environments
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TitleInteractive Transmission Sphere Selector
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TitleInterferogram Interpretation and Evaluation Guide
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TitleLaser Interferometer Accessory Guide
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TitleTransmission Sphere Selection Guide
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TitleVerifire™ XL
Title
Document
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Interactive Transmission Sphere Selector
DocumentInteractive Document
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Interferogram Interpretation and Evaluation Guide
DocumentReference Guide
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Laser Interferometer Accessory Guide
DocumentBrochure
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Transmission Sphere Selection Guide
DocumentBrochure
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Verifire™ XL
DocumentSpecifications
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TitleMetrology in Production Environments - QPSI Technology
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TitleMeasurement of Aspheric Surfaces
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TitleDetermining Asphere Measurability
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TitleGrazing Incidence Testing
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TitleInterferogram Scale Factor
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TitleSilver Overcoat Spray
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TitleTesting Cylindrical Surfaces with Computer Generated Holograms
img1
TitleFringe Analysis versus Phase Measuring Interferometry
Title
Document
Download Link
Metrology in Production Environments - QPSI Technology
DocumentAB-0102
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Measurement of Aspheric Surfaces
DocumentAN-0007
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Determining Asphere Measurability
DocumentAN-0008
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Grazing Incidence Testing
DocumentAN-0010
Download Link Download
Interferogram Scale Factor
DocumentAN-0015
Download Link Download
Silver Overcoat Spray
DocumentAN-0016
Download Link Download
Testing Cylindrical Surfaces with Computer Generated Holograms
DocumentAN-0017
Download Link Download
Fringe Analysis versus Phase Measuring Interferometry
DocumentAN-0018
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Finite Conjugate Lens Testing
DocumentAN-0019
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Testing Cylindrical Optics
DocumentAN-0020
Download Link Download
img1
TitleAligning a DynaFlect Transmission Flat
img1
TitleAperture Converter - Installation and Alignment Procedure
img1
TitleInterferogram Interpretation and Evaluation
img1
TitleLaser Interferometer Accessory Guide
Title
Document
Download Link
Aligning a DynaFlect Transmission Flat
DocumentOMP-0454A
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Aperture Converter - Installation and Alignment Procedure
DocumentOMP-0272C
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Interferogram Interpretation and Evaluation
DocumentInterEval.pdf
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Laser Interferometer Accessory Guide
DocumentOMP-0463AM
Download Link Download
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TitleSolutions for environmentally robust interferometric optical testing
img1
Title101 Frame Algorithm For Phase Shifting Interferometry
img1
TitleA next-generation optical surface form inspection instrument for high-volume production applications
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TitleA review of selected topics in interferometric optical metrology
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TitleAbsolute distance measurements using FTPSI with a widely tunable IR laser
img1
TitleAbsolute Interferometric Testing of Spherical Surfaces
img1
TitleAbsolute Measurement of Rotationally Symmetrical Aspheric Surfaces
img1
TitleAchieving Precision Radius Metrology for Large Optics
Title
Document
Download Link
Solutions for environmentally robust interferometric optical testing
DocumentTechnical Paper
Download Link Download
101 Frame Algorithm For Phase Shifting Interferometry
DocumentTechnical Paper
Download Link Download
A next-generation optical surface form inspection instrument for high-volume production applications
DocumentTechnical Paper
Download Link Download
A review of selected topics in interferometric optical metrology
DocumentTechnical Paper
Download Link Download
Absolute distance measurements using FTPSI with a widely tunable IR laser
DocumentTechnical Paper
Download Link Download
Absolute Interferometric Testing of Spherical Surfaces
DocumentTechnical Paper
Download Link Download
Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
DocumentTechnical Paper
Download Link Download
Achieving Precision Radius Metrology for Large Optics
DocumentTechnical Paper
Download Link Download
Adjustable coherence depth in a geometrically-desensitized interferometer
DocumentTechnical Paper
Download Link Download
Advances in optical metrology
DocumentTechnical Paper
Download Link Download

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