Verifire™ XL
Large-Aperture Downward-Looking Interferometer
Large aperture, small footprint – The Verifire XL is a turnkey interferometer workstation for easy testing of plano optics up to 300 mm diameter.
This fully integrated system is easy to use, with a heavy duty tip/tilt stage that provides repeatable part placement without the need for custom fixturing.
The compact footprint, with built-in vibration isolation and controller monitor stand, requires minimal production floor space.
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Stand-alone large aperture workstation for measuring plano optical surface form up to 12 inches (300 mm) in diameter such as mirrors, windows, semiconductor wafers, wafer chucks and blocked flats.
Key Features
- 12" (300 mm) aperture in downward-looking orientation for easy part handling and alignment
- Turnkey, self-contained system including interferometer mainframe, passive vibration isolation system, test part alignment stage and 1/15th wave PVr transmission flat (TF)
- Compact footprint minimizes consumption of valuable floor space
- Integrated vibration isolation and QPSI™ technology for reliable measurements in production environments
Title
Document
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TitleMetrology in Production Environments - QPSI Technology
TitleMeasurement of Aspheric Surfaces
TitleDetermining Asphere Measurability
TitleGrazing Incidence Testing
TitleInterferogram Scale Factor
TitleSilver Overcoat Spray
TitleTesting Cylindrical Surfaces with Computer Generated Holograms
TitleFringe Analysis versus Phase Measuring Interferometry
Title
Document
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Testing Cylindrical Surfaces with Computer Generated Holograms
DocumentAN-0017
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Title
Document
Download Link
TitleSolutions for environmentally robust interferometric optical testing
Title101 Frame Algorithm For Phase Shifting Interferometry
TitleA next-generation optical surface form inspection instrument for high-volume production applications
TitleA review of selected topics in interferometric optical metrology
TitleAbsolute distance measurements using FTPSI with a widely tunable IR laser
TitleAbsolute Interferometric Testing of Spherical Surfaces
TitleAbsolute Measurement of Rotationally Symmetrical Aspheric Surfaces
TitleAdjustable coherence depth in a geometrically-desensitized interferometer
Title
Document
Download Link
Solutions for environmentally robust interferometric optical testing
DocumentTechnical Paper
Download Link Download
101 Frame Algorithm For Phase Shifting Interferometry
DocumentTechnical Paper
Download Link Download
A next-generation optical surface form inspection instrument for high-volume production applications
DocumentTechnical Paper
Download Link Download
A review of selected topics in interferometric optical metrology
DocumentTechnical Paper
Download Link Download
Absolute distance measurements using FTPSI with a widely tunable IR laser
DocumentTechnical Paper
Download Link Download
Absolute Interferometric Testing of Spherical Surfaces
DocumentTechnical Paper
Download Link Download
Absolute Measurement of Rotationally Symmetrical Aspheric Surfaces
DocumentTechnical Paper
Download Link Download
Adjustable coherence depth in a geometrically-desensitized interferometer
DocumentTechnical Paper
Download Link Download
Applications of optical coherence in interferometric metrology
DocumentTechnical Paper
Download Link Download
