Nano-Position Sensors
ZYGO nano-position sensors are widely used in closed-loop motion control systems like photolithography and semiconductor inspection tool stages, as well as for deformable optical systems. We have pioneered innovations in the displacement and position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs.
Displacement Position Sensors
ZYGO's ZMI™ systems use heterodyne interferometer technology to precisely measure relative changes in position.
Absolute Position Sensors
ZYGO'S ZPS™ system uses ultra-compact non-contact optical sensors to measure absolute position over a range of 1.2 mm on up to 64 synchronized channels.
Applications
OEM Services
ZYGO's position measurement sensors have been used in OEM applications for over 30 years. We understand that you need to have a trusted partner to provide innovative position metrology solutions with reliable operation and consistent, on-time delivery.
Stage Servo Control
With over 30 years of experience, ZYGO's nano-position sensing products have become one of the most trusted, delivering continuous operation with exceptional performance. ZYGO is a market leader in displacement sensors providing feedback for closed-loop servo control on an OEM basis.
Adaptive Optics Control
Gain finer control of your adaptive optics by knowing how they are actually deforming! ZPS™ offers a massively parallel arrangement of up to 64 small-footprint sensors to directly measure the front or rear surface of a mirror or other optic, allowing you to reconstruct the surface deformation for best aberration correction.