Absolute Position Sensors

High-precision non-contact absolute position measurement on up to 64 synchronized channels

ZPS SensorZYGO's ZPS™ system measures absolute position using ultra-compact optical sensors that are easily integrated into high-precision applications such as deformable mirrors and lens positioning.

The optical sensor system provides up to 64 synchronized channels of high-precision, non-contact, absolute position measurement over a range of 1.2 mm. Measurement resolution is 0.01 nm with ≤ 1 nm/day measurement stability.

The optical sensors do not generate heat and are insensitive to electromagnetic interference, making the ZPS system ideal for high-precision applications that may be affected by these factors. The ultra-compact sensors connect to the compact centralized enclosure via fiber optic cables. ZYGO's complimentary ZPS™ software provides a plug-and-play connection between the ZPS system and your computer, allowing you to get up and running with your system quickly and easily.

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  • BROCHURES &
    SPEC SHEETS
  • MANUALS
  • TECH PAPERS

Applications

ZPS Integration AccessoriesThe ZPS system is typically used in closed-loop feedback systems that require a continuous stream of high-precision position data from multiple sensors to compensate for drift and maintain precise positioning and alignment. The system can also be used as a tool in RD&E and manufacturing environments for alignment in test fixtures or to quantify dynamic mechanical performance.

Key Features:

  • Non-contact optical measurement
  • Repeatable absolute position measurement (≤ 0.5 nm, 3σ)
  • High-precision system using proprietary compensation algorithms
  • Ultra-compact sensors with no EMI sensitivity or heat generation
  • Reliable telecom-proven fiber optic components
  • Scalable, up to 64 channels
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TitleNano-Position Sensors
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TitleZPS System
Title
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Nano-Position Sensors
DocumentBrochure
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ZPS System
DocumentSpecifications
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TitleZPS™ System Manual
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ZPS™ System Manual
DocumentOMP-0589B
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TitleAdvances in optical metrology
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TitleHigh-accuracy short-range displacement metrology
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TitleHigh-performance, multi-channel, fiber-based absolute distance measuring interferometer system
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TitleIn situ metrology for adaptive x-ray optics with an absolute distance measuring sensor array
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TitleReal-time feedback for x-ray adaptive optics with an interferometric absolute distance sensor array
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TitleReal-time in Situ Metrology of the Shape of an X-ray Adaptive Mirror Using an Array of Interferometric Absolute Position Sensors
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TitleRevelations in the art of fringe counting: The state of the art in distance measuring interferometry
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TitleValidation of the performance of a high-accuracy compact interferometer sensor
Title
Document
Download Link
Advances in optical metrology
DocumentTechnical Paper
Download Link Download
High-accuracy short-range displacement metrology
DocumentTechnical Paper
Download Link Download
High-performance, multi-channel, fiber-based absolute distance measuring interferometer system
DocumentTechnical Paper
Download Link Download
In situ metrology for adaptive x-ray optics with an absolute distance measuring sensor array
DocumentTechnical Paper
Download Link Download
Real-time feedback for x-ray adaptive optics with an interferometric absolute distance sensor array
DocumentTechnical Paper
Download Link Download
Real-time in Situ Metrology of the Shape of an X-ray Adaptive Mirror Using an Array of Interferometric Absolute Position Sensors
DocumentTechnical Paper
Download Link Download
Revelations in the art of fringe counting: The state of the art in distance measuring interferometry
DocumentTechnical Paper
Download Link Download
Validation of the performance of a high-accuracy compact interferometer sensor
DocumentTechnical Paper
Download Link Download

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