Displacement Measuring Interferometers
ZYGO position sensors are widely used in closed-loop motion control systems, mainly for lithography and inspection tool staging systems. We have pioneered innovations in the displacement position sensors for over 30 years, and we work closely with applications requiring the highest precision and reliability. Our team of applications experts is ready and able to help you tackle your position metrology needs.
Lasers
ZMI™ lasers provide highly stabilized, two-frequency output which provides a firm foundation for high-precision position metrology. These lasers are based on robust Helium Neon technology that has high reliability and is used as a standard definition of the meter.
Interferometers
ZYGO’s standard interferometer configurations support many types of measurement scenarios. Most interferometers can support a straight-through or right-angle measurement orientation and can be manufactured for operation in vacuum.
Measurement Electronics
Measurement electronics calculate displacement using optical signals from the interferometers driven by the laser source. Our patented Cyclic Error Correction option automatically and seamlessly eliminates common non-linear errors intrinsic in DMI systems.