Interferometers

ZMI™ Series – Displacement Measuring Interferometers

ZYGO’s standard interferometer configurations support many types of measurement scenarios. Most interferometers can support a straight-through or right-angle measurement orientation and can be manufactured for operation in vacuum.

  • MORE INFO
  • BROCHURES &
    SPEC SHEETS
  • MANUALS
  • TECH PAPERS

Linear Interferometers

This unit measures retroreflector targets for tracking objects moving primarily in one linear dimension or rotating about a fixed point. ZYGO offers a standard and compact size linear interferometer to accommodate different system space constraints. Examples: Reticle stages, gantry systems, steering mirrors

Plane Mirror Interferometers

This unit measures plane mirror targets for tracking objects moving in multiple linear dimensions with limited rotations. ZYGO’s plane mirror interferometers are designed for high stability to mitigate thermal error. Examples: Wafer stages, stacked stage systems

Wavelength Compensator

This unit measures changes in the index of refraction for use in compensating other measurement axes. ZYGO’s Compact Wavelength Compensator provides high precision feedback of index change for best performance of displacement measurement in ambient conditions.

 

Accessories

Complete the measurement system by routing the beam from the laser to the interferometers and ultimately to the measurement electronics. ZYGO offers a variety of standard fold mirrors, beamsplitters, fiber optic pickups, and fiber cables for flexible configuration of your measurement system.

ZMI Accessories

Custom Interferometer Designs

ZYGO specializes in custom multi-axis interferometer designs for OEM applications. Custom designs allow for consolidated beam delivery for applications where space is at a premium. It also reduces the amount of time required to align the system allowing for faster integration during production.

Custom Multi-Axis Interferometer
img1
TitleNano-Position Sensors
img1
TitleZMI Beam Reducing Telescope
img1
TitleZMI Beamsplitters 10% 33% 50% 75%
img1
TitleZMI Column Reference Interferometer (CRI), Vacuum Compatible
img1
TitleZMI Compact 3 Axis HSPMI
img1
TitleZMI Differential Plane Mirror Interferometer (DPMI)
img1
TitleZMI Fiber Optics Pickup 9mm
img1
TitleZMI Fiber Optics Pickup 9mm SS
Title
Document
Download Link
Nano-Position Sensors
DocumentBrochure
Download Link Download
ZMI Beam Reducing Telescope
DocumentSpecifications
Download Link Download
ZMI Beamsplitters 10% 33% 50% 75%
DocumentSpecifications
Download Link Download
ZMI Column Reference Interferometer (CRI), Vacuum Compatible
DocumentSpecifications
Download Link Download
ZMI Compact 3 Axis HSPMI
DocumentSpecifications
Download Link Download
ZMI Differential Plane Mirror Interferometer (DPMI)
DocumentSpecifications
Download Link Download
ZMI Fiber Optics Pickup 9mm
DocumentSpecifications
Download Link Download
ZMI Fiber Optics Pickup 9mm SS
DocumentSpecifications
Download Link Download
ZMI Fold Mirror
DocumentSpecifications
Download Link Download
ZMI Fold Mirror Large
DocumentSpecifications
Download Link Download
img1
TitleZMI™ 501A Displacement Measuring Interferometer System
img1
TitleZMI™ Cable Guide
img1
TitleZMI™ Compact Wavelength Compensator Accessory
img1
TitleZMI™ Differential Plane Mirror Interferometer
img1
TitleZMI™ Optics Guide
Title
Document
Download Link
ZMI™ 501A Displacement Measuring Interferometer System
DocumentOMP-0532B
Download Link Download
ZMI™ Cable Guide
DocumentOMP-0333R
Download Link Download
ZMI™ Compact Wavelength Compensator Accessory
DocumentOMP-0415F
Download Link Download
ZMI™ Differential Plane Mirror Interferometer
DocumentOMP-0223E
Download Link Download
ZMI™ Optics Guide
DocumentOMP-0326AA
Download Link Download
img1
TitleA high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
img1
TitleA New Laser Measurement System for Precision Metrology
img1
TitleAdvances in optical metrology
img1
TitleConcepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
img1
TitleDifferential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
img1
TitleDisplacement Measuring Interferometry (book chapter)
img1
TitleDisplacement Measuring Interferometry Measurement Uncertainty
img1
TitleDisplacement-Measuring Interferometers Provide Precise Metrology
Title
Document
Download Link
A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
DocumentTechnical Paper
Download Link Download
A New Laser Measurement System for Precision Metrology
DocumentTechnical Paper
Download Link Download
Advances in optical metrology
DocumentTechnical Paper
Download Link Download
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
DocumentTechnical Paper
Download Link Download
Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
DocumentTechnical Paper
Download Link Download
Displacement Measuring Interferometry (book chapter)
DocumentTechnical Paper
Download Link Download
Displacement Measuring Interferometry Measurement Uncertainty
DocumentTechnical Paper
Download Link Download
Displacement-Measuring Interferometers Provide Precise Metrology
DocumentTechnical Paper
Download Link Download
Encoders graduating to extreme precision
DocumentTechnical Paper
Download Link Download
Error Sources in Displacement Measuring Interferometry
DocumentTechnical Paper
Download Link Download

* Required entries
 Required for USA and Canada
Note:
If you experience any difficulty submitting this form, contact: webmaster@zygo.com

** You may withdraw this consent at any time using the "unsubscribe" link at the bottom of any page on this web site.
X
By continuing to use this site, you agree to our Privacy and Cookie Policy
OK