Measurement Electronics

ZMI™ Series – Displacement Measuring Interferometers

ZMI Measurement Electronics Board

ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.

The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.

The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.

For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates  common non-linear errors intrinsic in DMI systems.

  • MORE INFO
  • BROCHURES &
    SPEC SHEETS
  • MANUALS
  • TECH PAPERS
Model: 501A 2400 4004 4104(C)
Number of Axes/Board: 2 1 or 2 4
Board Type: Enclosure 6U VME 6U VME64x
Minimum Optical Power: 8.0 µW 1.9 µW 1.0 µW 0.07 µW
Position Resolution: 1.24 nm 0.31 nm 0.15 nm
Max. Velocity: ±0.475 m/s ±2.1 m/s ±2.55 m/s
Accuracy at Max Velocity (σ): 1.6 nm 0.5 nm 0.2 nm
Cyclic Error Compensation: No Yes
Compatible Laser(s): 7705 7702, 7714, and 7724
  Note: Specifications are for double-pass interferometers.
img1
Service Brochure
img1
Nano-Position Sensors
img1
ZMI 2400 Measurement Board
img1
ZMI 4004 Measurement Board
img1
ZMI 4104 Measurement Board
img1
ZMI 501A Enclosure
Title
Document
Download
Service Brochure
DocumentBrochure
Download Download
Nano-Position Sensors
DocumentBrochure
Download Download
ZMI 2400 Measurement Board
DocumentSpecifications
Download Download
ZMI 4004 Measurement Board
DocumentSpecifications
Download Download
ZMI 4104 Measurement Board
DocumentSpecifications
Download Download
ZMI 501A Enclosure
DocumentSpecifications
Download Download
img1
ZMI 2400 Measurement Board Manual Addendum 0588C
img1
ZMI™ 2400 Series Measurement Board
img1
ZMI™ 4000 Series Measurement Board
img1
ZMI™ 4100 Series Measurement Board
img1
ZMI 4-Axis PYD Interferometer spec 0558D
img1
ZMI™ 501A Displacement Measuring Interferometer System
img1
ZMI custom HSPMI Interferometer Spec 0564G
img1
ZMI Fiber Optic pickup 18mm SS Specs 0542E
Title
Document
Download
ZMI 2400 Measurement Board Manual Addendum 0588C
DocumentOMP-0588C
Download Download
ZMI™ 2400 Series Measurement Board
DocumentOMP-0537R
Download Download
ZMI™ 4000 Series Measurement Board
DocumentOMP-0460Z
Download Download
ZMI™ 4100 Series Measurement Board
DocumentOMP-0508T
Download Download
ZMI 4-Axis PYD Interferometer spec 0558D
DocumentOMP-0558D
Download Download
ZMI™ 501A Displacement Measuring Interferometer System
DocumentOMP-0532C
Download Download
ZMI custom HSPMI Interferometer Spec 0564G
DocumentOMP-0564G
Download Download
ZMI Fiber Optic pickup 18mm SS Specs 0542E
DocumentOMP-0542E
Download Download
img1
A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
img1
A New Laser Measurement System for Precision Metrology
img1
Advances in optical metrology
img1
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
img1
Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
img1
Displacement Measuring Interferometry (book chapter)
img1
Displacement Measuring Interferometry Measurement Uncertainty
img1
Displacement-Measuring Interferometers Provide Precise Metrology
Title
Document
Download
A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
DocumentTechnical Paper
Download Download
A New Laser Measurement System for Precision Metrology
DocumentTechnical Paper
Download Download
Advances in optical metrology
DocumentTechnical Paper
Download Download
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
DocumentTechnical Paper
Download Download
Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
DocumentTechnical Paper
Download Download
Displacement Measuring Interferometry (book chapter)
DocumentTechnical Paper
Download Download
Displacement Measuring Interferometry Measurement Uncertainty
DocumentTechnical Paper
Download Download
Displacement-Measuring Interferometers Provide Precise Metrology
DocumentTechnical Paper
Download Download
Encoders graduating to extreme precision
DocumentTechnical Paper
Download Download
Error Sources in Displacement Measuring Interferometry
DocumentTechnical Paper
Download Download

* Required entries
 Required for USA and Canada
Note:
If you experience any difficulty submitting this form, contact: webmaster@zygo.com

** You may withdraw this consent at any time using the "unsubscribe" link at the bottom of any page on this web site.