Measurement Electronics
ZMI™ Series – Displacement Measuring Interferometers
ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.
The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.
The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.
For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates common non-linear errors intrinsic in DMI systems.
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MORE INFO
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BROCHURES &
SPEC SHEETS -
MANUALS
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TECH PAPERS
| Model: | 501A | 2400 | 4004 | 4104(C) |
| Number of Axes/Board: | 2 | 1 or 2 | 4 | |
| Board Type: | Enclosure | 6U VME | 6U VME64x | |
| Minimum Optical Power: | 8.0 µW | 1.9 µW | 1.0 µW | 0.07 µW |
| Position Resolution: | 1.24 nm | 0.31 nm | 0.15 nm | |
| Max. Velocity: | ±0.475 m/s | ±2.1 m/s | ±2.55 m/s | |
| Accuracy at Max Velocity (σ): | 1.6 nm | 0.5 nm | 0.2 nm | |
| Cyclic Error Compensation: | No | Yes | ||
| Compatible Laser(s): | 7705 | 7702, 7714, and 7724 | ||
| Note: Specifications are for double-pass interferometers. | ||||
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TitleA high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
TitleA New Laser Measurement System for Precision Metrology
TitleAdvances in optical metrology
TitleConcepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
TitleDifferential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
TitleDisplacement Measuring Interferometry (book chapter)
TitleDisplacement Measuring Interferometry Measurement Uncertainty
TitleDisplacement-Measuring Interferometers Provide Precise Metrology
Title
Document
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A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
DocumentTechnical Paper
Download Link Download
A New Laser Measurement System for Precision Metrology
DocumentTechnical Paper
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Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
DocumentTechnical Paper
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Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
DocumentTechnical Paper
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Displacement Measuring Interferometry Measurement Uncertainty
DocumentTechnical Paper
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Displacement-Measuring Interferometers Provide Precise Metrology
DocumentTechnical Paper
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Error Sources in Displacement Measuring Interferometry
DocumentTechnical Paper
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