Measurement Electronics
ZMI™ Series – Displacement Measuring Interferometers

ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.
The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.
The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.
For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates common non-linear errors intrinsic in DMI systems.
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MORE INFO
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BROCHURES &
SPEC SHEETS -
MANUALS
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TECH PAPERS
Model: | 501A | 2400 | 4004 | 4104(C) |
Number of Axes/Board: | 2 | 1 or 2 | 4 | |
Board Type: | Enclosure | 6U VME | 6U VME64x | |
Minimum Optical Power: | 8.0 µW | 1.9 µW | 1.0 µW | 0.07 µW |
Position Resolution: | 1.24 nm | 0.31 nm | 0.15 nm | |
Max. Velocity: | ±0.475 m/s | ±2.1 m/s | ±2.55 m/s | |
Accuracy at Max Velocity (σ): | 1.6 nm | 0.5 nm | 0.2 nm | |
Cyclic Error Compensation: | No | Yes | ||
Compatible Laser(s): | 7705 | 7702, 7714, and 7724 | ||
Note: Specifications are for double-pass interferometers. |
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ZMI 2400 Measurement Board Manual Addendum 0588C

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A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system

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Advances in optical metrology

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Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications

Displacement Measuring Interferometry (book chapter)

Displacement Measuring Interferometry Measurement Uncertainty

Displacement-Measuring Interferometers Provide Precise Metrology
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A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
DocumentTechnical Paper
Download Download
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
DocumentTechnical Paper
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Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
DocumentTechnical Paper
Download Download
Displacement Measuring Interferometry Measurement Uncertainty
DocumentTechnical Paper
Download Download
Displacement-Measuring Interferometers Provide Precise Metrology
DocumentTechnical Paper
Download Download