Measurement Electronics

ZMI™ Series – Displacement Measuring Interferometers

ZMI Measurement Electronics Board

ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.

The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.

The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.

For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates  common non-linear errors intrinsic in DMI systems.

  • MORE INFO
  • BROCHURES &
    SPEC SHEETS
  • MANUALS
  • TECH PAPERS
Model: 501A 2400 4004 4104(C)
Number of Axes/Board: 2 1 or 2 4
Board Type: Enclosure 6U VME 6U VME64x
Minimum Optical Power: 8.0 µW 1.9 µW 1.0 µW 0.07 µW
Position Resolution: 1.24 nm 0.31 nm 0.15 nm
Max. Velocity: ±0.475 m/s ±2.1 m/s ±2.55 m/s
Accuracy at Max Velocity (σ): 1.6 nm 0.5 nm 0.2 nm
Cyclic Error Compensation: No Yes
Compatible Laser(s): 7705 7702, 7714, and 7724
  Note: Specifications are for double-pass interferometers.
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TitleNano-Position Sensors
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TitleZMI 2400 Measurement Board
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TitleZMI 4004 Measurement Board
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TitleZMI 4104 Measurement Board
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TitleZMI 501A Enclosure
Title
Document
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Nano-Position Sensors
DocumentBrochure
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ZMI 2400 Measurement Board
DocumentSpecifications
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ZMI 4004 Measurement Board
DocumentSpecifications
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ZMI 4104 Measurement Board
DocumentSpecifications
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ZMI 501A Enclosure
DocumentSpecifications
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TitleZMI™ 2400 Series Measurement Board
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TitleZMI™ 4000 Series Measurement Board
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TitleZMI™ 4100 Series Measurement Board
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TitleZMI™ 501A Displacement Measuring Interferometer System
Title
Document
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ZMI™ 2400 Series Measurement Board
DocumentOMP-0537M
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ZMI™ 4000 Series Measurement Board
DocumentOMP-0460Y
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ZMI™ 4100 Series Measurement Board
DocumentOMP-0508S
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ZMI™ 501A Displacement Measuring Interferometer System
DocumentOMP-0532B
Download Link Download
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TitleA high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
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TitleA New Laser Measurement System for Precision Metrology
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TitleAdvances in optical metrology
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TitleConcepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
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TitleDifferential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
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TitleDisplacement Measuring Interferometry (book chapter)
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TitleDisplacement Measuring Interferometry Measurement Uncertainty
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TitleDisplacement-Measuring Interferometers Provide Precise Metrology
Title
Document
Download Link
A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
DocumentTechnical Paper
Download Link Download
A New Laser Measurement System for Precision Metrology
DocumentTechnical Paper
Download Link Download
Advances in optical metrology
DocumentTechnical Paper
Download Link Download
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
DocumentTechnical Paper
Download Link Download
Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
DocumentTechnical Paper
Download Link Download
Displacement Measuring Interferometry (book chapter)
DocumentTechnical Paper
Download Link Download
Displacement Measuring Interferometry Measurement Uncertainty
DocumentTechnical Paper
Download Link Download
Displacement-Measuring Interferometers Provide Precise Metrology
DocumentTechnical Paper
Download Link Download
Encoders graduating to extreme precision
DocumentTechnical Paper
Download Link Download
Error Sources in Displacement Measuring Interferometry
DocumentTechnical Paper
Download Link Download

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