Measurement Electronics
ZMI™ Series – Displacement Measuring Interferometers
ZMI™ measurement electronics calculate displacement using optical signals from the interferometers driven by a ZMI™ laser source.
The ZMI™ 501A provides two axes of measurement in a convenient stand-alone enclosure.
The ZMI™ 2400, 4000, and 4100 series boards provide sub-nanometer resolution to service the most challenging position metrology applications. These boards can be modularly added in a VME chassis to provide scalability up to 64 axes of measurements.
For ultimate measurement precision, our patented Cyclic Error Correction option automatically and seamlessly eliminates common non-linear errors intrinsic in DMI systems.
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MORE INFO
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BROCHURES &
SPEC SHEETS -
MANUALS
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TECH PAPERS
| Model: | 501A | 2400 | 4004 | 4104(C) |
| Number of Axes/Board: | 2 | 1 or 2 | 4 | |
| Board Type: | Enclosure | 6U VME | 6U VME64x | |
| Minimum Optical Power: | 8.0 µW | 1.9 µW | 1.0 µW | 0.07 µW |
| Position Resolution: | 1.24 nm | 0.31 nm | 0.15 nm | |
| Max. Velocity: | ±0.475 m/s | ±2.1 m/s | ±2.55 m/s | |
| Accuracy at Max Velocity (σ): | 1.6 nm | 0.5 nm | 0.2 nm | |
| Cyclic Error Compensation: | No | Yes | ||
| Compatible Laser(s): | 7705 | 7702, 7714, and 7724 | ||
| Note: Specifications are for double-pass interferometers. | ||||
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ZMI 2400 Measurement Board Manual Addendum 0588C
ZMI™ 2400 Series Measurement Board
ZMI™ 4000 Series Measurement Board
ZMI™ 4100 Series Measurement Board
ZMI 4-Axis PYD Interferometer spec 0558D
ZMI™ 501A Displacement Measuring Interferometer System
ZMI custom HSPMI Interferometer Spec 0564G
ZMI Fiber Optic pickup 18mm SS Specs 0542E
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A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
A New Laser Measurement System for Precision Metrology
Advances in optical metrology
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
Displacement Measuring Interferometry (book chapter)
Displacement Measuring Interferometry Measurement Uncertainty
Displacement-Measuring Interferometers Provide Precise Metrology
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Document
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A high-accuracy, multi-channel, fiber-based displacement/distance measuring interferometer system
DocumentTechnical Paper
Download Download
Concepts And Geometries for the Next Generation of Precision Heterodyne Optical Encoders
DocumentTechnical Paper
Download Download
Differential interferometer arrangements for distance and angle measurements: Principles, advantages and applications
DocumentTechnical Paper
Download Download
Displacement Measuring Interferometry Measurement Uncertainty
DocumentTechnical Paper
Download Download
Displacement-Measuring Interferometers Provide Precise Metrology
DocumentTechnical Paper
Download Download