In the field of precision optics, ZYGO fabricates world-class plano, aspheric and spherical surfaces, and precision machined structures.

Our precision optics team has over 20 engineers with a distinguished heritage. Their project experiences range from aspherical optics used to repair the Hubble Space Telescope, to the development of sub-nanometer precision EUV optics used in today's most demanding lithographic systems. Whether you need us to develop a Scope of Work, build a prototype system, or redesign for improved performance, ZYGO is ready to take on your most demanding optical challenges.


Aspheric & Freefrom Surfaces

Freeform Optics
  • Sizes to 500 mm
  • Materials: ZERODUR®, ULE®, Glass, Ceramics, Si, CaF2
  • Accuracy to λ/5000 RMS @ 633 nm
  • Off-axis mirrors without parent fabrication
  • Technologies:
    • Computer Controlled Optical Surfacing
    • Ion Beam Figuring
    • Precision optical & CMM metrology

Computer Controlled Optical Surfacing

Computer Controlled Optical Surfacing

  • Aspheres & precision sphere, flats, cylinders
  • Can achieve 1 nm RMS surface figure and 0.2 nm RMS surface roughness (glass)
  • Configurable for glass, CaF2, ZERODUR®, ULE®, SiC, Si, other materials and a wide range of part geometries
  • Scalable for optics beyond 1.5 meters
  • Employs proprietary Computer Controlled Optical Surfacing (CCOS) technology

Super Finishing / Super Polishing

Super Finishing of surfaces is often required for applications where it is critical to reduce the scattering of light as it passes through the surface of an optic. ZYGO's Super Finishing (also known as Super Polishing) process produces extremely smooth surfaces over a wide power spectral density (PSD) band on materials such as fused silica, sapphire, YAG, etc. Our unique process is capable of producing a surface roughness of < 1 Angstrom (< 0.1 nm), over spatial periods ranging from 10 nm to 1 mm.

Ion Beam Figuring (IBF)

This proprietary technology employs an Argon ion stream in a vacuum to locally "polish" aspherical, spherical and flat optical surfaces. Data from optical metrology is coupled with CCOS software to locally correct surface errors.

IBF offers significant advantages:

Power Spectra Density of Superfinishing Process
  • Achieves surface figure of less than 0.25 nm RMS (λ/2500 @ 633 nm)
  • Insensitive to edge boundary conditions
  • Works on delicate and/or easily deformed surfaces such as ultra lightweight substrates (no print through)
  • Can be applied to surface geometries that are not accessible to conventional polishing tools
  • Applicable to a wide range of materials including ZERODUR®, ULE®, glass, ceramic, Si, CaF2
  • Can not scratch surfaces

Precision Glass Machining

  • 5-axis ultrasonic CNC machining of glass and ceramic material; 3 to 5 times faster than traditional CNC
  • 3- & 4-axis conventional CNC glass machining
  • Post machine hydrofluoric acid-etching
  • 5 µm tolerances typical; 2 µm on key features post-acid etch
  • Sizes to 750 mm
Precision Optical Components & Systems
Optical Solutions for Defense & Aerospace Applications
Precision Optical Components & Systems
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Optical Solutions for Defense & Aerospace Applications
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